DIY fabrication of microstructures by projection photolithography
نویسنده
چکیده
Previous hobbyists have demonstrated fabrication of single macroscale transistors and simple gates in silicon. These experiments, however, have been hampered by the inability to create features much below 1mm in size. This paper presents a simple and affordable projection photolithography technique which can be used to create microstructures using easily obtainable materials. Methods of alignment for multilevel mask designs are demonstrated. Test patterns with 15μm features are fabricated in dry-film photoresist on copper substrates. Potential for further scaling (down to 2μm using immersion lithography) is discussed.
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